METHOD FOR FORMING MAGNETIC LAYER, FILM DEPOSITION DEVICE, AND MAGNETIC RECORDING AND PLAYBACK DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for forming a magnetic layer capable of forming the magnetic layer having stable magnetic characteristics and magnetic recording and playback characteristics by heightening uniformity of oxygen radical concentration distribution in a sputtering chamber and making oxygen concentration taken in a magnetic film uniform in the surface direction when the magnetic layer having a granular structure is formed on both surfaces of a substrate by using reactive sputter. SOLUTION: A substrate 200 on which a film is to be deposited is disposed in a reaction vessel 101 so that the surface direction thereof is in the vertical direction. A pair of electrode units having sputtering electrodes and a target disposed on the surfaces of the sputtering electrodes are disposed so that the target faces to the substrate 200 side to face to both surfaces of the substrate 200. A mixture gas including an argon gas and an oxygen gas is supplied to parts near to the surfaces on the substrate 200 side of the pair of electrode units so as to flow toward a center part from a peripheral part and an exhaust gas is exhausted from both end parts of the reaction vessel 101 to form the magnetic layer by reactive sputtering. COPYRIGHT: (C)2010,JPO&INPIT