| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a transparent electrode for photoelectric converter with less fluctuations in the electrical characteristics on a substrate and superior light confinement effect, and capable of improving the performance of a thin-film photoelectric converter by using the method. <P>SOLUTION: The method for manufacturing a substrate with transparent conductive film for photoelectric converter includes: a process, wherein a first transparent electrode layer having surface roughness where zinc oxide is doped with impurities at a certain concentration is formed, in the order starting from the substrate side, by using a low pressure CVD method; and a process, wherein a second transparent electrode layer is formed by increasing the amount of raw material gas of zinc in a range that is 1.2-3 times higher, as compared with that in the first transparent electrode layer. The time for forming the second transparent electrode layer is in a range of 1/25 to 1/5 of the time for the formation of the first transparent electrode layer. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
