| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS switch capable of preventing an effect of warping due to a material stress. SOLUTION: The MEMS switch is provided with: a base plate having an open mouth portion; a driving arm of which the piezoelectric driving portion having a piezoelectric layer and electrode layers arranged on and below the piezoelectric layer is formed on one face and of which at least one end is fixed on the base plate; and a fixed arm, which has a signal line and the same layer as that of the driving arm on part of a lower portion of the signal line and of which at least one end is fixed on the base plate. Then, the driving arm and the fixed arm partially cover the open mouth portion of the base plate, and the signal line in the fixed arm extends over the driving arm and can be contacted with the driving arm at a part where it overlaps with the driving arm. If the fixed arm is structured to have the same layer with the driving arm, the warping of a same degree as the driving arm is caused to the fixed arm to prevent an effect of a material stress. COPYRIGHT: (C)2010,JPO&INPIT
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