发明名称 METHOD FOR FORMING CATALYST NANOPARTICLE FOR GROWING ELONGATED NANOSTRUCTURE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for providing at least one catalyst nanoparticle on at least one sidewall of a three-dimensional structure on a substrate, and an excellent method for forming an elongated nanostructure by using the catalyst nanoparticles as the catalyst. <P>SOLUTION: The method comprises providing at least one catalyst nanoparticle 8 on at least one sidewall 10 of the three-dimensional structure on a main face 15 of the substrates 1a, 1b, the main surface 15 being in the face, the side wall 10 of the three-dimensional structure being in a face roughly vertical to the main face of the substrates 1a, 1b; obtaining the three-dimensional structure including catalyst nanoparticles 7 embedded in a non-catalytic matrix 5; and selectively removing at least part of the non-catalytic matrix 5 at the sidewalls 10 of the three-dimensional structure to thereby expose at least one catalyst nanoparticle 8. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009255025(A) 申请公布日期 2009.11.05
申请号 JP20080173401 申请日期 2008.07.02
申请人 IMEC 发明人 RADISIC ALEKSANDER;VEREECKEN PHILIPPE M
分类号 B01J37/02;B82B3/00;C23C16/27;H01L29/06;H01L51/05;H01L51/30;H01L51/40 主分类号 B01J37/02
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