| 摘要 |
<p>Provided is a fluid controller of which the vibration-proof performance is improved without affecting its pressure control operation. A valve element (4) is moved relative to a valve seat (3) due to a change in balance between the fluid pressure applied to a diaphragm (10) and the elastic force by a pressure setting spring (13), whereby the fluid pressure is controlled. A vibration-proof member (17) is disposed on a disk-like movable member (12) moving integrally with the diaphragm (10). The vibration-proof member (17) has a weight interposed between elastic bodies built in a casing.</p> |
