VERFAHREN UND VORRICHTUNG ZUR REINIGUNG VON EINEM HALBLEITERWAFER,申请号DE20006042970-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUR REINIGUNG VON EINEM HALBLEITERWAFER
摘要
申请公布号	DE60042970(D1)	申请公布日期	2009.10.29
申请号	DE20006042970	申请日期	2000.05.30
申请人	LAM RESEARCH CORP.	发明人	MIKHAYLICH, KATRINA A.;RAVKIN, MIKE;ANDERSON, DON E.
分类号	H01L21/00;H01L21/304	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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