A VACUUM EFFUSION CELL FOR FORMING A THIN FILM

摘要

PURPOSE: A vacuum evaporation apparatus for manufacturing thin film on a substrate surface is provided to accurately control source material ejection and to form the thin film in a vacuum evaporation method about polymer. CONSTITUTION: A vacuum evaporation apparatus for manufacturing thin film on a substrate surface includes a quartz tube, a first heating source(11) and second heating source(12). The quartz tube is extended in a longitudinal direction. The first heating source includes an external case supporting the heating line. The second heating source is located and separated from the quartz tube. The heating line is separated from the second case.