| 摘要 |
A micro mirror unit includes a micro mirror substrate (100), a wiring substrate (200) and an electroconductive spacer disposed between these substrates. The micro mirror substrate (100) includes a moving part, a frame (130) and torsion bars (150) connecting the moving part to the frame (130). The moving part is provided with a mirror-formed portion (110). The wiring substrate (200) is formed with a wiring pattern. The electroconductive spacer electrically connects the frame (130) to the wiring pattern, while also providing a space between the micro mirror substrate (100) and the wiring substrate (200). <IMAGE> |
