| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a washing tool capable of preventing breakage of a quartz plate due to its insertion between an outer body and a washing tool body and also warp and breakage of the washing tool itself. <P>SOLUTION: The washing tool to be used when washing a thin plate comprises: a first outer body having the first recessed parts which are formed with the first base parts and the first frame parts and in which the thin plate is inserted, and the first through-holes formed at the bottom; and a second outer body having second the recessed parts which are formed with the second base parts and the second frame parts, and the second through-holes formed at the bottom. The first frame parts are fitted in the second frame parts. <P>COPYRIGHT: (C)2010,JPO&INPIT |
