| 摘要 |
PROBLEM TO BE SOLVED: To provide a lens measuring device or the like for improving workability and enhancing through-put of measuring processing at low cost. SOLUTION: The lens measuring device includes: eliminating inclination of a reference plane member PM on a measuring fixture 51 at an aberration measuring position by using an interference measuring device 10; next, performing calibration concerning inclination of an inclination detection device 41 by using the inclination detection device 41 to detect the reference plane member PM on the measuring fixture 51 at an inclination measuring position; thereby enabling relative position adjustment making an optical axis OA of the interference measuring device 10 and an optical axis OA2 of the inclination detection device 41 parallel; in addition, thereafter using the inclination detection device 41 to detect a lens to be tested ML on the measuring fixture 51 at the inclination measuring position; matching an optical axis of the lens to be tested ML with the optical axis OA2 to eliminate the inclination; and thereafter using the interference measuring device 10 to measure wave face aberration of the lens to be tested ML on the measuring fixture 51 at the aberration measuring position. COPYRIGHT: (C)2010,JPO&INPIT |
