| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem, wherein a servo system which has been constituted so that the displacement of a vibrator due to Coriolis force becomes zero has limits in increasing the gain of the serve system, since the vibrator has resonance characteristics and there a re limits in the responsivity of the servo system. <P>SOLUTION: A detection part is configured so that the vibrator may vibrate at a predetermined oscillation frequency and make the Coriolis force act on this vibrator, and external force is repeatedly applied to the vibrator by a control system so as to cancel this Coriolis force. Consequently, a high-sensitivity angular velocity sensor having a high S/N ratio is acquired. <P>COPYRIGHT: (C)2010,JPO&INPIT |
