ALIGNMENT DEVICE FOR PLANAR ELEMENT, MANUFACTURING EQUIPMENT FOR THE SAME, ALIGNMENT METHOD FOR THE SAME, AND MANUFACTURING METHOD FOR THE SAME

摘要

An alignment device (10) for a planar element (2) includes an imaging section (11) to image a picture of a non-rotational symmetry-shaped alignment mark M provided on the planar element (2), a position detection section (12) to detect a position of the alignment mark M from the image, a position adjustment section (13) to adjust a relative position of a specified reference position and the planar element (2) in accordance with a detected position of the alignment mark M, and an orientation detection section (14) to detect an orientation of the planar element (2) in accordance with the non-rotational symmetry of the alignment mark M imaged on a picture.