发明名称 Method for transporting band-shaped substrate through treatment regions of a vacuum coating plant, comprises moving the substrate through a treatment region and air-lock region lying before or behind the treatment region
摘要 <p>The method comprises moving a band-shaped substrate (4) through a treatment region (2) and air-lock region (3) lying before or behind the treatment region. The substrate is continuously moved within the treatment region of a treatment device (24) and discontinuously moved within the air-lock region. The substrate is diverted to two moving parts from the transportation level in such a way that it temporarily forms a loop at each moving part and is discontinuously moved between first and the last moving part. The first and last loops are formed within the treatment region. The method comprises moving a band-shaped substrate (4) through a treatment region (2) and air-lock region (3) lying before or behind the treatment region. The substrate is continuously moved within the treatment region of a treatment device (24) and discontinuously moved within the air-lock region. The substrate is diverted to two moving parts from the transportation level in such a way that it temporarily forms a loop at each moving part and is discontinuously moved between first and the last moving part. The first and last loops are formed within the treatment region. A further loop is temporarily formed between first and the last loop and within the air-lock region in a further moving part. A moving organ for the formation of the loop is moved transverse to the transportation level of the substrate and is intended in the moving part. The substrate is present before and behind the moving organ by a supporting organ in the transportation level and is moved by power transmission of the supporting organ. The power transmission takes place in projecting sections of the substrate by producing a positive connection between the supporting organ and the substrate. The two surfaces of the substrate are sealed within the region of the discontinuous movement of the moving part intermittently against a parallel gas flow running to the transportation level. The surfaces of the substrate are sealed by simultaneous operation of a supporting organ and a sealing organ on one of the two surfaces. The intermittent sealing takes place in two sealing places in the opposite alternating operation. An independent claim is included for a vacuum coating plant for coating a band-shaped substrate.</p>
申请公布号 DE102008017492(A1) 申请公布日期 2009.10.08
申请号 DE20081017492 申请日期 2008.04.04
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 OBST, HENRIK;GOTTSMANN, LUTZ;KOENIG, ROLAND
分类号 C23C16/54;C23C14/50;C23C14/56;C23C16/458 主分类号 C23C16/54
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