LIQUID SPRAY HEAD, LIQUID SPRAY DEVICE, AND PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a liquid spray head capable of suppressing a crack of a piezoelectric layer associated with drive of a piezoelectric element; a liquid spray device; and a piezoelectric element.

SOLUTION: This liquid spray head is provided with: the piezoelectric element including a lower electrode formed on a passage formation substrate having a pressure generation chamber communicating with a nozzle spraying droplets; a piezoelectric body layer formed on the lower electrode; and an upper electrode formed on the piezoelectric body layer. The liquid spray head is structured such that the piezoelectric body layer is formed of a ferroelectric material of a perovskite crystal structure, and the ratio of the surface roughness of the piezoelectric body layer to that of the lower electrode is 0.58-1.60.

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