发明名称 ORGANIC THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME, AND ACTIVE MATRIX DISPLAY AND RADIO RECOGNITION TAG USING THE SAME
摘要 An organic thin film transistor of the present invention includes a substrate (11) and a semiconductor layer (14) made of an organic semiconductor and formed on the substrate (11). The semiconductor layer (14) is composed of crystals of the organic semiconductor, and a crystal phase of the crystals is the same as a crystal phase of energetically most stable bulk crystals of the organic semiconductor. A method for manufacturing the organic thin film transistor of the present invention includes forming the semiconductor layer (14) by depositing an organic semiconductor on the substrate (11). The organic semiconductor is deposited at a deposition rate of 0.1 to 1 nm/min while maintaining the temperature of the substrate (11) in the range of 40 to 150° C.
申请公布号 US2009253228(A1) 申请公布日期 2009.10.08
申请号 US20090486234 申请日期 2009.06.17
申请人 PANASONIC CORPORATION 发明人 NANAI NORISHIGE;YAMAMOTO SHINICHI;KAWAKITA TETSUO
分类号 H01L51/40;H01L27/28;H01L51/30 主分类号 H01L51/40
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