| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively perform the microinspection of an inspection body on a floating plate in a microinspection device, and a microinspection method. Ž<P>SOLUTION: The microinspection device includes the floating plate 2 for floating the inspection body and actuators (2b and 10b) for moving the floating plate 2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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