| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond membrane synthetic method by a combustion flame method which synthesizes a diamond membrane being high quality diamond and having a high bonding strength by using a high-purity acetylene gas. SOLUTION: In the diamond membrane synthetic method by the combustion flame method, a high-purity acetylene-oxygen combustion gas prepared by using a high-purity acetylene gas 3 capable of maintaining an about constant purity (C<SB>2</SB>H<SB>2</SB>99.5% or higher) regardless of the remaining amount in a gas cylinder is used, and a nitrogen gas 4 is used as a diamond synthesis acceleration component. More specifically, a combustion gas with a flow ratio (O<SB>2</SB>/C<SB>2</SB>H<SB>2</SB>) of high-purity acetylene-oxygen of 0.9 is mixed with a nitrogen gas, as the diamond synthesis acceleration component, with a flow ratio (N<SB>2</SB>/(C<SB>2</SB>H<SB>2</SB>+O<SB>2</SB>+N<SB>2</SB>)) of 0.28-0.40%. COPYRIGHT: (C)2010,JPO&INPIT
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