| 摘要 |
There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element section thereof. An angular velocity sensor element 1 according to the present embodiment includes: sensor units 10a to 10c with driven-related and detection-related vibrating arms; a base section 4 which couples the sensor units 10a to 10c; a first fixed section 6 which is frame-shaped and which surrounds the base section 4 and the sensor units 10a to 10c; first coupling arms 5a to 5c which couple the base section 4 to the first fixed section 6; a second fixed section 8 which is disposed in at least a part of the area around the first fixed section 6; and second coupling arms 7a to 7c which couple the first fixed section 6 to the second fixed section 8.
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