| 摘要 |
<p>The invention provides a SiC coated carbonaceous material and a carbonaceous material to be coated with SiC each of which is reduced in contents of such impurities as nitrogen and boron. The SiC coated carbonaceous material comprises a carbonaceous material and a SiC coating having a nitrogen content of 5 x 10 16 atoms/cm 3 or lower as measured by SIMS. Further, the SiC-coated carbonaceous material comprises a carbonaceous material and a SiC coating having a boron content of 2 x 10 16 atoms/cm 3 or lower as measured by SIMS. The carbonaceous substrate material preferably has nitrogen content of 5 x 10 18 atoms/cm 3 or lower as measured by SIMS. The base carbonaceous material also preferably has boron content of 1 x 10 16 atoms/cm 3 or lower as measured by SIMS.</p> |
