| 摘要 |
PROBLEM TO BE SOLVED: To improve settling characteristics by prolonging charging time in a high-current range. SOLUTION: The semiconductor test apparatus comprises: a plurality of resistors 5A to 5E which are arranged in parallel between an output amplifier 4 for amplifying and outputting input voltage and a DUT 2 and have different resistance values; a resistor selection section 25 for selecting one resistor out of the resistors 5A to 5E on the basis of the capacitance of the DUT 2; a current restriction section 9 for restricting the output voltage of the output amplifier 4: and a switch control section 26 which is a means for performing switching control on a first switch SW1 for selectively connecting one resistor out of the resistors 5A to 5E and which performs switching control on the first switch SW1 so as to connect the resistor selected by the resistor selection section 25 when the current restriction section 9 restricts the output voltage of the output amplifier 4. COPYRIGHT: (C)2009,JPO&INPIT
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