发明名称 HOMOTHERMAL AIR SUPPLY APPARATUS
摘要 PROBLEM TO BE SOLVED: To uniformize the air volume distribution and temperature distribution of homothermal air at a low cost, and to improve stability, reliability, adaptiveness, and versatility while maintaining uniform temperature distribution and the like. SOLUTION: A box part 6 for forming an air rectification chamber Cp which rectifies and exhausts homothermal air Ac discharged from a discharge opening 3po of a blast part 3p is provided between the discharge opening 3po of the blast part 3p and an air-conditioned part M. A surface on the homothermal air discharge side of the box part 6p comprises a main rectification plate 7p having many small holes Hm. The discharge opening 3po of the blast part 3p is connected to a surface on the homothermal air intake side of the box 6p. At a position away from the discharge opening 3po by a predetermined interval, an auxiliary rectification plate 8p is arranged which has many small holes Hs that disperse and rectify the homothermal air Ac entering from the discharge opening 3po. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009206239(A) 申请公布日期 2009.09.10
申请号 JP20080045616 申请日期 2008.02.27
申请人 ORION MACH CO LTD 发明人 YOSHIZAWA SHINKEN;USHINAGARE YOSHINORI;TOMIZAWA OSAMU
分类号 H01L21/02 主分类号 H01L21/02
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