发明名称 |
COATING TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND COATING TREATMENT APPARATUS |
摘要 |
The present invention is a coating treatment method of applying a water-soluble coating solution onto a substrate, including: a first step of supplying pure water to a central portion of the substrate in a manner that the pure water does not diffuse over an entire surface of the substrate; a second step of subsequently supplying the water-soluble coating solution to a central portion of the pure water on the substrate to form a mixed layer of the coating solution and the pure water, under the coating solution; and a third step of subsequently diffusing the mixed layer over the substrate to diffuse the coating solution over the entire surface of the substrate. |
申请公布号 |
US2009226621(A1) |
申请公布日期 |
2009.09.10 |
申请号 |
US20090395914 |
申请日期 |
2009.03.02 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
YAMASHITA MITSUO;ISEKI TOMOHIRO |
分类号 |
B05D3/12;B05C11/00 |
主分类号 |
B05D3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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