| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that it is hard to improve inspection speed without sacrificing detection sensitivity, and vice versa, or to improve both of them, since they are in a relation of trade-off, when limiting illuminance at measurement spots in order to prevent heat damage to an inspected body, and further to solve a problem that detection sensitivity becomes lower in an outer circumferential part of the inspected body than in an inner circumferential part thereof. SOLUTION: A plurality of measuring units comprising an illumination optics system, the measurement spot, a collection optics system, and a light detection means are provided, inspection results obtained from the plurality of measurement spots are integrated, and light-amount distribution to each measurement spot is controlled according to a scan radial position. COPYRIGHT: (C)2009,JPO&INPIT
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