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发明名称
用于金属移除速率控制之卤化物阴离子
摘要
本发明化学机械抛光组合物包含液体载剂、过氧化氢、苯并三唑及卤素阴离子。本发明方法包含以该抛光组合物化学机械抛光一基板。
申请公布号
TW200936735
申请公布日期
2009.09.01
申请号
TW097147860
申请日期
2008.12.09
申请人
卡博特微电子公司
发明人
李守田
分类号
C09K3/14(2006.01);C09G1/02(2006.01);H01L21/304(2006.01)
主分类号
C09K3/14(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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