发明名称 |
MULTIPLE INLET ABATEMENT SYSTEM |
摘要 |
A method of operating an electronic device manufacturing thermal abatement system is provided, including: flowing a gaseous effluent through an inlet into a thermal abatement reaction chamber; abating the effluent; flowing the abated effluent through an outlet out of the thermal abatement reaction chamber; using a pressure sensor to measure an inlet pressure; using the same pressure sensor to measure an outlet pressure; wherein the pressure sensor sequentially measures the inlet pressure and the outlet pressure; determining the difference between the inlet pressure and the outlet pressure; and if the difference between the inlet pressure and the outlet pressure exceeds a pre-determined pressure, diverting the flow of effluent away from the inlet. Numerous other aspects are provided. ® KIPO & WIPO 2009
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申请公布号 |
KR20090091316(A) |
申请公布日期 |
2009.08.27 |
申请号 |
KR20097013721 |
申请日期 |
2007.12.05 |
申请人 |
APPLIED MATERIALS INC. |
发明人 |
LOLDJ YOUSSEF A.;GELO MIROSLAV;DIAZ MANUEL;CRAWFORD SHAUN |
分类号 |
B01D53/00;B01J19/00;H01L21/00 |
主分类号 |
B01D53/00 |
代理机构 |
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地址 |
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