| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transparent conductive film having a sufficient conductivity and using a material having a high freedom in optical design, since reflection prevention by optical design is effective for obtaining a high performance of the transparent conductive film. <P>SOLUTION: In the method for manufacturing the transparent conductive film, by using a magnetron sputtering in which a gas having carbon dioxide 50 vol% or less added in hydrogen or argon is used as a carrier gas, a carbon film of which the refractive index is controlled to 1.35-1.85 is formed on a transparent conductive oxide layer having zinc oxide as a main component on the transparent substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
