| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner that can be miniaturized and can perform maskless exposure by stable operation. <P>SOLUTION: The aligner 10 includes: a plurality of light sources 12a-12d; an MEMS optical scanner for inclining a mirror M repeatedly; and an exposure optical system for exposing an object to be exposed to light to light from the plurality of light sources via the mirror. Light from the plurality of light sources is applied to the object to be exposed to light by scanning by the mirror inclined using the MEMS optical scanner. <P>COPYRIGHT: (C)2009,JPO&INPIT |
