| 摘要 |
PROBLEM TO BE SOLVED: To provide a regeneration apparatus of a cleaning solvent capable of taking out the regenerated cleaning solvent containing little moisture without reheating only by heating once in a still for gasification, and a distilling regeneration method of the cleaning solvent. SOLUTION: The regeneration apparatus of cleaning a solvent includes the still 2, a first gas cooler 21, a second gas cooler 23, an ejector 52, and a sludge tank 35. A cooling tube 24 is provided in the first gas cooler as a first cooling means, a cooling tube 39 is provided in the second gas cooler as a second cooling means. The first cooling means is set to cool the inside of the cooler to the temperature higher than the boiling point of water and allowing liquefaction of the cleaning solvent, and the second cooling means is set to cool the inside of the cooler to the temperature allowing condensation of steam. Gas fed from the still is passed through from the first gas cooler to the second gas cooler to liquefy the cleaning solvent gas in the gas in the first gas cooler, and the remaining gas is fed to the second gas cooler to liquefy remaining component like steam. COPYRIGHT: (C)2009,JPO&INPIT
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