| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a conveyance chamber to/from which a conveyance robot can be easily attached and detached for maintenance etc., and to provide a method of easily detaching the conveyance robot from the conveyance chamber and a method of easily attaching the conveyance robot to the conveyance chamber. <P>SOLUTION: The conveyance chamber 10 where the conveyance robot 1 is installed and whose atmospheric pressure can be adjusted is supported on a floor surface 8 via a process chamber 2 and a work chamber as supporting bodies. A lower cover plate 12a, a side cover plate 12b and an upper cover plate 12c which cover a frame constituting the conveyance chamber 10 in an airtight state are disposed, and the base unit 6 of the conveyance robot 1 is fitted, in a suspended state, to the lower frame of the frame via an opening portion provided to the lower cover plate 12a. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
