| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optic device, the method capable of forming functional layers having the same thickness even when the functional layers are formed by filling a liquid matter into recesses having different opening widths and removing a solvent, and to provide a liquid ejection device used for manufacturing the electro-optic device. SOLUTION: In manufacturing an element substrate 10 of an electro-optic device 100, either the element substrate for a low-resolution electro-optic device or the element substrate for a high-resolution electro-optic device is manufactured by ejecting a liquid matter 85 into recesses 5e surrounded by a partition wall 5b to fill the recesses 5e with the liquid matter 85 and then removing the solvent component from the liquid matter 85 to form an organic functional layer 86. During this process, when the opening width W1 of the recesses 5e is small, the liquid matter 85 having a high concentration of functional layer forming material is filled into the recesses 5e so as to form protruding meniscuses and, when the opening width W2 of the recesses 5e is large, the liquid matter 85 having a low concentration of functional layer forming material is filled into the recesses 5e so as to form protruding meniscuses. COPYRIGHT: (C)2009,JPO&INPIT
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