| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing single crystal silicon by which a seed crystal can simply be held in such a state that the seed crystal is exactly aligned with a polycrystalline silicon rod. SOLUTION: In the apparatus for producing single crystal silicon, the seed crystal 6 held by a seed crystal holder 7 and a polycrystalline silicon rod S1 held by a polycrystal holder 5 are arranged oppositely to each other in a housing, and the polycrystalline silicon rod is fusion-bonded to the seed crystal 6 while being heated and melted and grown into a single crystal. In the seed crystal holder 7, a housing hole 22 for holding one end part of the seed crystal 6 in an upright posture is formed, a fixing screw 26 for fixing one end part of the seed crystal 6 housed in the housing hole 22 is arranged orthogonally to the axis line of the housing hole 22, and the inner peripheral surface of the housing hole 22 is formed into a tapered face 22a having the gradually increasing diameter toward its opening 21. COPYRIGHT: (C)2009,JPO&INPIT
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