| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection device which accurately inspects the coating of an object to be inspected. <P>SOLUTION: The coating inspection device 10 receives fluorescence from the object to be inspected, receiving coating of a substrate 1 subjected to ultraviolet light to generate a plurality of images, each of which is separated into various color components. This coating inspection device 10 inspects coating of the substrate 1, based on at least one among the generated images. The device 10 may select and inspect any one of these color-separated images by each inspection region. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
