| 摘要 |
<p>A photo spinner apparatus and a wafer carrier loading/unloading method thereof are provided to prevent delay of a photolithography process by using a wafer carrier loader. A photo spinner apparatus includes a spin coater, a baking device, a developer, a transfer and an indexer. The spin coater coats photoresist film on a plurality of wafers(172). The baking device solidifies the coated photoresist film in the coater. The developer develops the solidified photoresist film in the baking device. The transfer carries the plurality of wafers between the developer, the baking device and the spin coater. The indexer has a wafer carrier loader(160). The wafer carrier loader arranges a plurality of wafer carrier(170) to be stacked vertically. The wafer carrier receives the plurality of wafers carried by the transfer.</p> |
