发明名称 SEMICONDUCTOR DEVICE INCLUDING INSULATED-GATE FIELD-EFFECT TRANSISTOR
摘要 Fins of semiconductor are formed on the substrate. Each of the fins is located separately from one another. A gate insulating film is formed on side surfaces of the fins. A gate electrode is formed on the gate insulating film. The gate electrode extends to cross over the fins. A gate contact portion is provided to supply an electric signal. In the fins, first drain regions and first source regions are formed respectively so as to sandwich portions of the fins located below the gate electrode. A width of first one of the fins is larger than that of second one of the fins which is more distant from the gate contact portion than the first one of the fins.
申请公布号 US2009174000(A1) 申请公布日期 2009.07.09
申请号 US20080341906 申请日期 2008.12.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 OHGURO TATSUYA
分类号 H01L29/78;H01L23/48;H01L23/52 主分类号 H01L29/78
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