| 摘要 |
A substrate inspection device comprises a substrate rotating device for holding the substrate on a holding surface and causing rotation, disk having a disk body rotatably supported on a base and three lift cams fixed to an upper side of the disk body and formed with cam faces that are inclined surfaces inclined in the rotational direction, and a lifter having a lifter body with a support surface on which the substrate is mounted and guiding in the vertical direction and lifter driven sections respectively projecting to and fixed to a lower side of the lifter body, wherein lower sides of the lifter driven sections respectively contact the cam faces in sliding manner at contact points, and if the contact points are moved to an upper side of the inclined surfaces the support surface becomes higher than the holding surface. With this structure, it is possible to provide a substrate inspection device and substrate inspection method that can improve measurement precision, and a substrate inspection device, substrate inspection method and recovery tool suitable for causing a droplet to adhere to an outer surface of a substrate and move along the outer surface. |
