| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of accurately processing a substrate on a pedestal without reducing throughput by increasing stiffness in the pedestal. SOLUTION: The stage device 101 has the pedestal 110, a gantry section 130 movably provided in a uniaxial direction on the pedestal 110, and a vibration isolation unit 150 supporting the pedestal 110. The pedestal 110 has an upper frame 112 built by connecting a can member in a frame shape, a lower frame 122 vertically separated from the upper frame 112 built by connecting the can member in a frame shape, and a connecting material 118 for connecting the upper frame 112 with the lower one 122. The stage device 101 further has a trestle 170 for supporting the upper frame 112 by a post 178 via the vibration isolation unit 150 from a lower part. COPYRIGHT: (C)2009,JPO&INPIT |
