发明名称 Apparatus and method for cleaning a surface with high pressure air
摘要 A cleaning apparatus and method which includes spraying high pressure air obliquely onto a cleaning surface from an air nozzle disposed in the vicinity of the cleaning surface of a cleaning object to be cleaned. A recovery portion of the cleaning apparatus which is disposed in front of an outlet port of the air nozzle recovers at least air containing foreign matter removed from the cleaning object by making the air exhaust into an exhaust introducing passage along a wall surface of an air guide. The recovery portion of the cleaning apparatus includes an air guide section disposed in front of the outlet port of the air nozzle, and an air cover section, which forms an exhaust introducing passage for recovering the air that flows along an air guide wall surface of the air guide section.
申请公布号 US7552503(B2) 申请公布日期 2009.06.30
申请号 US20040879022 申请日期 2004.06.30
申请人 SONY CORPORATION 发明人 WAKAO MITSUNOBU;TERAI MASAKI;OHSHIMA YUKITOYO
分类号 A47L5/38;B08B5/00;A47L15/00;B08B3/02;B08B3/12;B08B5/02;B08B6/00;B08B7/02;B08B7/04;B08B15/04;H01L21/00;H01L21/304 主分类号 A47L5/38
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