发明名称 PHOTO DIODE AND RELATED METHOD FOR FABRICATION
摘要 A method for fabricating a photo diode first involves providing a substrate. A doping area is then formed on the substrate. Afterwards, a dielectric layer, and a first poly-silicon layer are formed on the substrate. An opening is then formed to expose a surface of the doping area. A second poly-silicon layer is formed on the first poly-silicon layer and within the opening. The second poly-silicon layer is patterned to form a wire, while the first poly-silicon layer is patterned to form a gate. Finally, a source/drain is formed.
申请公布号 US2009162971(A1) 申请公布日期 2009.06.25
申请号 US20090393048 申请日期 2009.02.26
申请人 SZE JHY-JYI;WANG MING-YI;CHEN JUNBO 发明人 SZE JHY-JYI;WANG MING-YI;CHEN JUNBO
分类号 H01L31/18;H01L21/00 主分类号 H01L31/18
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