发明名称 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM
摘要 According to one embodiment, a method of manufacturing a magnetic recording medium includes forming protruded magnetic patterns on a substrate, depositing a nonmagnetic material in recesses between the magnetic patterns and on the magnetic patterns, and etching back the nonmagnetic material using an oxygen-containing etching gas while reforming a surface of the nonmagnetic material.
申请公布号 US2009162704(A1) 申请公布日期 2009.06.25
申请号 US20090400224 申请日期 2009.03.09
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KIMURA KAORI;KAMATA YOSHIYUKI;SHIROTORI SATOSHI;SAKURAI MASATOSHI
分类号 G11B5/706;G11B5/84 主分类号 G11B5/706
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