DEVICE FOR MANUFACTURING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a device for manufacturing semiconductor constituted so that data can be copied and moved between semiconductor manufacturing devices with high precision even when a removable record medium used to copy and move the data has low reliability. SOLUTION: The semiconductor manufacturing device includes a control means 42 of controlling movement of data between a first storage means 43 for data for processing execution and a second storage means 45 for temporary storage. A copy source file is copied as a temporary file from the first storage means 43 to a temporary folder and also copied as a copy destination file to a copy destination folder of the second storage means 45, and the temporary file and copy destination file are compared with each other in units of predetermined bytes to delete the copy destination file in the second storage means 45 and the temporary file in the temporary folder on deciding abnormality when they have differences or to delete the temporary file in the temporary folder when the files are wholly compared with each other and have no difference. COPYRIGHT: (C)2009,JPO&INPIT