摘要 |
A closed-loop heater control circuit for use with integrated circuit thermal sensing devices, such as thermal accelerometers, is disclosed. The heater control circuit includes a switched-capacitor integrating circuit and a controller or modulator. The switched-capacitor integrating unit integrates a common-mode voltage signal from an instrument amplifier with respect to an analog common reference voltage. In operation, the switched-capacitor integrating unit is adapted so that the closed-loop is opened briefly at the beginning of every new cycle, e.g., using an enable signal, during fast start-up or power-down.
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