METHOD FOR MANUFACTURING ANTIREFLECTION STRUCTURE

摘要

PROBLEM TO BE SOLVED: To manufacture an antireflection structure having a finely rugged portion.

SOLUTION: A method for manufacturing an antireflection structure includes steps of: preparing a substrate 27 having a rough surface 27p with a surface roughness larger than a predetermined wavelength; depositing metal in an island state on the rough surface 27p of the substrate 27; and dry etching the substrate 27 by using the island-shaped deposited material 28 as a mask to form a plurality of acicular and finely rugged portions 29 having an average pitch equal to or less than the predetermined wavelength on the rough surface 27p of the substrate 27.

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