| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing ceramic substrate capable of increasing a thickness and a total number of an inner conductor, and hardly causing the problem of delamination, even in such case. SOLUTION: The method of manufacturing a ceramic substrate includes a preparing step of preparing a conductive paste containing conductive powders and a solvent, a first coating step of coating the conductive paste on a plurality of supporting elements, a second coating step of coating ceramic slurry on the plurality of supporting elements respectively so as to cover the conductive paste when there remains a solvent for conductive paste having mass concentration of 15% or more compared with the amount at the start of the first coating step, a drying step of drying the conductive paste and the ceramic slurry simultaneously to form a ceramic green sheet, a peeling step of peeling supporting elements from a laminated body stacking supporting elements and the ceramic green sheet, a stacking step of stacking a plurality of ceramic green sheets peeled-off supporting elements, and a sintering step of sintering the stacked ceramic green sheets. COPYRIGHT: (C)2009,JPO&INPIT |
