| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To hold a device at an appropriate position, and to accurately and stably perform required inspection, in the inspection of an electrical characteristic of the device. <P>SOLUTION: This holding member 3 for inspection has a base 30 that can be mounted with a chip C on which the device is formed and is formed of silicone or glass. A positioning member 31 formed of resist sheets 32 and 33 is formed on the front surface of the base 30. A resist film 40 is formed on the back surface of the base 30, and a suction groove 41 (crossing section 41a and link section 41b) and a strut member 42 are formed in the resist film 40. A suction hole 50 is formed in a region T mounted with the chip C of the front surface of the base 30, and the suction hole 50 communicates with the suction groove 41 through the base 30. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
