| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment apparatus or a method for vacuum treatment which enhances the efficiency of treatment by controlling the contamination of a treatment object sample caused by dust particles. SOLUTION: A vacuum treatment apparatus comprising an internally decompressed treatment chamber for treating an article in the shape of a substrate, an introduction chamber for importing or exporting an article into or from the treatment apparatus, and an internally-decompressed conveyance chamber for delivering the article between the treatment chamber and the introduction chamber is further provided with an intermediate chamber arranged between the conveyance chamber and the treatment chamber, joints arranged among the conveyance chamber, the intermediate chamber and the treatment chamber, respectively, and each having an opening through which the article is carried in, valves for opening and closing openings of these joints airtightly, and a pressure adjusting means which can adjust the pressure of the intermediate chamber independently from the conveyance chamber and the treatment chamber. COPYRIGHT: (C)2009,JPO&INPIT
|
