| 摘要 |
A system and method are provided for fabricating an orifice plate (14) for use in an ink jet printing system. Initially, a substrate base (16) is provided, and a controlled-release layer (18) is applied to a surface of the substrate base (16). A conductive metal layer (20) is adherently coated on the controlled-release layer (18). At least one dielectric peg (22) is created on a portion of the conductive metal layer (20), and a nozzle layer (24) is applied on the conductive metal layer (20) to partially cover the dielectric peg (22). Photolithography is used to define a trench that covers the nozzles prior to formation of a second reinforcing layer. The controlled-release layer (18) is removed to separate the orifice plate (14) from the substrate base (12). The conductive metal layer (20) is selectively etched from the nozzle layer (24) to produce a completed multi-layer orifice plate (14). <IMAGE> |
