| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating type X-ray observation apparatus which can perform real-time and accurate observation of the behavior of a workpiece under actual heating condition by X-ray irradiation at a position nearest to a workpiece such as electronic components or the like housed in a heating furnace. SOLUTION: The heating type X-ray observation apparatus includes a heating furnace 12 which houses and heats a workpiece 20 as an object for soldering and an X-ray inspection unit 13 which inspects a state of soldering after applying an X ray to the workpiece 20. The X-ray inspection unit 13 includes an X-ray irradiation tube 30 which is projected into the heating furnace 12 under heating treatment and of which X-ray target part 40 at its tip end gives an X ray at a position close to the inspection region of the workpiece 20. COPYRIGHT: (C)2009,JPO&INPIT
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