发明名称 Tuning Bar Vibrator and Vibrating Gyroscope Using the Same
摘要 A tuning bar vibrator formed on a substrate and including a vibrating body. The vibrating body is formed into a meander shape as a whole, and a middle vibrating reed is used as a first detection unit. At one end side of the vibrating body, two sensing electrodes are formed and connected respectively to two extended electrodes. A further sensing electrode and a common electrode are formed on a first principal surface of the first detection unit. A common electrode formed on a second principal surface of the vibrating body is connected to the common electrode on the first principal surface via a through-hole. The further sensing electrode and the common electrode are connected respectively to another set of extended electrodes. A tuning bar vibrator that is small in size, may be reduced in profile and may be used as a vibrating gyroscope having a desirable detection sensitivity, and a vibrating gyroscope using the tuning bar vibrator are obtained.
申请公布号 US2009133497(A1) 申请公布日期 2009.05.28
申请号 US20090355034 申请日期 2009.01.16
申请人 MURATA MANUFACTURING CO., LTD. 发明人 FUJIMOTO KATSUMI;KOIKE MASATO
分类号 G01C19/56 主分类号 G01C19/56
代理机构 代理人
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