发明名称 |
MICROMIRROR DEVICE AND A METHOD OF MAKING THE SAME |
摘要 |
A reflective and deformable micromirror device comprises a reflective micromirror plate attached to a deformable hinge that is formed on and held by a hinge post on a substrate. The substrate has an addressing electrode formed thereon. A selected dielectric material is disposed between the deformable hinge and the addressing electrode.
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申请公布号 |
US2009130303(A1) |
申请公布日期 |
2009.05.21 |
申请号 |
US20070941416 |
申请日期 |
2007.11.16 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MEZENNER RABAH |
分类号 |
B05D5/06;G02B7/182;G02B26/08 |
主分类号 |
B05D5/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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