ANNULAR NOZZLE STRUCTURE FOR HIGH DENSITY INKJET PRINTHEADS

摘要

A method for fabricating an orifice plate with high density arrays of nozzles entails disposing a photoresist layer on a glass with a metalized layer forming a photomask blank and patterning the photomask blank with one or more openings. Second openings are formed by etching through the initial openings into the photoresist layer. The photoresist layer is removed and a second photoresist layer is added to the formed patterned structure forming a mandrel. One or more rings are patterned onto the mandrel. Each ring has an outer diameter larger than the diameter of the second openings and an inner diameter smaller than the diameter of the second openings. The mandrel with formed rings is plated with a metal forming an orifice plate. The orifice plate is separated from the patterned mandrel, forming an orifice plate with a high density array of nozzles